Multifunctional Top-Coats Strategy for DSA of High-? Block Copolymers
نویسندگان
چکیده
A concept of patternable top-coats dedicated to directed self-assembly high-? block copolymers is detailed, where the design enables a crosslinking reaction triggered by thermal or photo-activation. Nanostructured BCP areas with controlled domains orientation are selected through straightforward top-coat lithography step unique integration pathways. Additionally, crosslinked nature material suppression dewetting, while exhibiting exceptional capabilities for construction 3D stacks.
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2021
ISSN: ['0914-9244', '1349-6336']
DOI: https://doi.org/10.2494/photopolymer.34.11